Invention Grant
US07692254B2 Fin-type field effect transistor structure with merged source/drain silicide and method of forming the structure
有权
具有合并源极/漏极硅化物的鳍型场效应晶体管结构和形成结构的方法
- Patent Title: Fin-type field effect transistor structure with merged source/drain silicide and method of forming the structure
- Patent Title (中): 具有合并源极/漏极硅化物的鳍型场效应晶体管结构和形成结构的方法
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Application No.: US11778217Application Date: 2007-07-16
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Publication No.: US07692254B2Publication Date: 2010-04-06
- Inventor: Brent A. Anderson , Andres Bryant , John J. Ellis-Monaghan , Edward J. Nowak
- Applicant: Brent A. Anderson , Andres Bryant , John J. Ellis-Monaghan , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb I.P. Law Firm, LLC
- Agent Richard M. Kotulak, Esq.
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119

Abstract:
Disclosed herein are embodiments of a multiple fin fin-type field effect transistor (i.e., a multiple fin dual-gate or tri-gate field effect transistor) in which the multiple fins are partially or completely merged by a highly conductive material (e.g., a metal silicide). Merging the fins in this manner allow series resistance to be minimized with little, if any, increase in the parasitic capacitance between the gate and source/drain regions. Merging the semiconductor fins in this manner also allows each of the source/drain regions to be contacted by a single contact via as well as more flexible placement of that contact via.
Public/Granted literature
Information query
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