Invention Grant
US07692254B2 Fin-type field effect transistor structure with merged source/drain silicide and method of forming the structure 有权
具有合并源极/漏极硅化物的鳍型场效应晶体管结构和形成结构的方法

Fin-type field effect transistor structure with merged source/drain silicide and method of forming the structure
Abstract:
Disclosed herein are embodiments of a multiple fin fin-type field effect transistor (i.e., a multiple fin dual-gate or tri-gate field effect transistor) in which the multiple fins are partially or completely merged by a highly conductive material (e.g., a metal silicide). Merging the fins in this manner allow series resistance to be minimized with little, if any, increase in the parasitic capacitance between the gate and source/drain regions. Merging the semiconductor fins in this manner also allows each of the source/drain regions to be contacted by a single contact via as well as more flexible placement of that contact via.
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