Invention Grant
- Patent Title: Fuse and seal ring
- Patent Title (中): 保险丝和密封圈
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Application No.: US11094151Application Date: 2005-03-31
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Publication No.: US07692265B2Publication Date: 2010-04-06
- Inventor: Toshiyuki Takewaki , Noriaki Oda
- Applicant: Toshiyuki Takewaki , Noriaki Oda
- Applicant Address: JP Kanagawa
- Assignee: NEC Electronics Corporation
- Current Assignee: NEC Electronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Young & Thompson
- Priority: JP2004-101882 20040331
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
There is provided a semiconductor device excellent in reliability. The semiconductor device is comprised of a semiconductor substrate, an insulating portion having a multilayer insulating film composed of an etch stopper film, an insulating film, an etch stopper film, an insulating film, an etch stopper film and an insulating film provided on an upper portion of the semiconductor, fuses provided on the insulating portion, and a seal ring composed of a copper containing metal film, a barrier metal film, a copper containing metal film and a barrier metal film embedded in the insulating portion so as to surround a region just below the fuses.
Public/Granted literature
- US20050218477A1 Semiconductor device and method for manufacturing the same Public/Granted day:2005-10-06
Information query
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