Invention Grant
- Patent Title: Reinforced semiconductor structures
- Patent Title (中): 加强半导体结构
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Application No.: US11649244Application Date: 2007-01-04
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Publication No.: US07692274B2Publication Date: 2010-04-06
- Inventor: Hsien-Wei Chen , Shih-Hsun Hsu
- Applicant: Hsien-Wei Chen , Shih-Hsun Hsu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L23/544
- IPC: H01L23/544

Abstract:
Reinforced semiconductor structures are provided. An exemplary embodiment of a reinforced semiconductor structure comprises a semiconductor wafer comprising a plurality of dielectric layers formed thereon. At least one scribe line region is defined over the semiconductor wafer, separating the semiconductor wafer with at least two active regions thereover. A plurality of first non-dielectric pillars are formed in the topmost layer of the dielectric layers in the scribe line region and surround the test pad along a periphery. A plurality of second non-dielectric pillars and first vias are formed in a first low-k dielectric layer underlying the topmost low-k layer in the scribe line region, wherein the second non-dielectric pillars electrically connect the first non-dielectric pillars by the first vias, respectively.
Public/Granted literature
- US20080164468A1 Reinforced semiconductor structures Public/Granted day:2008-07-10
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