Invention Grant
- Patent Title: Microelectronic circuit structure with layered low dielectric constant regions
- Patent Title (中): 微电子电路结构具有层状低介电常数区域
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Application No.: US12256735Application Date: 2008-10-23
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Publication No.: US07692308B2Publication Date: 2010-04-06
- Inventor: Lawrence A. Clevenger , Matthew E. Colburn , Louis C. Hsu , Wai-Kin Li
- Applicant: Lawrence A. Clevenger , Matthew E. Colburn , Louis C. Hsu , Wai-Kin Li
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Daniel P. Morris, Esq.
- Main IPC: H01L29/40
- IPC: H01L29/40

Abstract:
The circuit structure includes at least two generally parallel conductor structures, and a plurality of substantially horizontal layers of layer dielectric material interspersed with substantially horizontally extending relatively low dielectric constant (low-k) volumes. The substantially horizontal layers and the substantially horizontally extending volumes are generally interposed between the at least two generally parallel conductor structures. Also included are a plurality of substantially vertically extending relatively low-k volumes sealed within the substantially horizontal layers and the substantially horizontally extending volumes between the at least two generally parallel conductor structures. The substantially vertically extending relatively low-k volumes and the substantially horizontally extending relatively low-k volumes reduce parasitic capacitance between the at least two generally parallel conductor structures as compared to an otherwise comparable microelectronic circuit not including the relatively low-k volumes.
Public/Granted literature
- US20090072410A1 MICROELECTRONIC CIRCUIT STRUCTURE WITH LAYERED LOW DIELECTRIC CONSTANT REGIONS Public/Granted day:2009-03-19
Information query
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