Invention Grant
US07692362B2 Actuating device, fabricating method thereof, and module variation control device using the actuating device 失效
驱动装置及其制造方法以及使用该致动装置的模块变形控制装置

Actuating device, fabricating method thereof, and module variation control device using the actuating device
Abstract:
An actuating device is provided, which includes a deformable membrane, walls formed on the membrane to define cavities, rods formed within the cavities, and on the surface of the membrane on one side with reference to a cavity center, to move in association with the deformation of the membrane, and an actuating unit formed on a lower side of the membrane to be piezoelectrically driven to deform the membrane. The actuating device is applicable to miniaturized electronic devices and can actuate the function modules appropriately.
Information query
Patent Agency Ranking
0/0