Invention Grant
- Patent Title: Method and device for load matching
- Patent Title (中): 负载匹配的方法和装置
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Application No.: US11670637Application Date: 2007-02-02
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Publication No.: US07692389B2Publication Date: 2010-04-06
- Inventor: Thomas Kirchmeier
- Applicant: Thomas Kirchmeier
- Applicant Address: DE Freiburg
- Assignee: HUETTINGER Elektronik GmbH + Co. KG
- Current Assignee: HUETTINGER Elektronik GmbH + Co. KG
- Current Assignee Address: DE Freiburg
- Agency: Fish & Richardson P.C.
- Priority: DE102006005128 20060204
- Main IPC: H05B31/26
- IPC: H05B31/26
Abstract:
The impedance of a variable load is matched to the output resistance of an HF generator by performing a first impedance matching for a first load impedance and by performing a second impedance matching for a second load impedance. The first impedance matching is carried out at a first frequency and the second impedance matching is carried out at a second frequency.
Public/Granted literature
- US20070194628A1 METHOD AND DEVICE FOR LOAD MATCHING Public/Granted day:2007-08-23
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