Invention Grant
- Patent Title: Bimetallic probe with tip end
- Patent Title (中): 带末端的双金属探针
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Application No.: US10565156Application Date: 2005-05-19
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Publication No.: US07692438B2Publication Date: 2010-04-06
- Inventor: Kazumichi Machida , Atsuo Urata , Takeshi Konno , Akira Ishida , Mitsuru Egashira , Mikihiko Kobayashi
- Applicant: Kazumichi Machida , Atsuo Urata , Takeshi Konno , Akira Ishida , Mitsuru Egashira , Mikihiko Kobayashi
- Applicant Address: JP Tsukuba JP Amagasaki
- Assignee: National Institute for Materials Science,Japan Electronic Materials Corporation
- Current Assignee: National Institute for Materials Science,Japan Electronic Materials Corporation
- Current Assignee Address: JP Tsukuba JP Amagasaki
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2004-161844 20040531
- International Application: PCT/JP2005/009177 WO 20050519
- International Announcement: WO2005/116667 WO 20051208
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
It is an object of the present invention to provide a probe which can provide stable electrical conduction to an electrode of an object to be measured even when it is miniaturized. A probe 100 comprises a columnar contact part 110 which can come in contact with an electrode 10 of an object to be measured almost perpendicularly, and a base end (not shown) connected to the contact part 110, the contact part 110 comprises a base part 111 and an expansion part 111a bonded to an end of the base part 111 in a width direction, and the expansion part 111a is formed of a material having a thermal expansion coefficient higher than that of the base part 111.
Public/Granted literature
- US20080054916A1 Probe Public/Granted day:2008-03-06
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