Invention Grant
- Patent Title: Lithographic apparatus
- Patent Title (中): 平版印刷设备
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Application No.: US11797649Application Date: 2007-05-04
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Publication No.: US07692766B2Publication Date: 2010-04-06
- Inventor: Stephen Roux
- Applicant: Stephen Roux
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding NV
- Current Assignee: ASML Holding NV
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G02B7/02

Abstract:
A projection system suitable for use in a lithographic apparatus, the projection system including a transmissive optical element and a thermal profile corrector configured to change a thermal profile of the transmissive optical element, the thermal profile corrector including a transfer member and a thermal profile conditioner, the transfer member being moveable into and out of proximity with the transmissive optical element to transfer a desired thermal profile from the thermal profile conditioner into the transmissive optical element.
Public/Granted literature
- US20080273180A1 Lithographic apparatus Public/Granted day:2008-11-06
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