Invention Grant
- Patent Title: Iron core motor driven automatic reticle blind
- Patent Title (中): 铁芯电机驱动自动掩模版盲
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Application No.: US11427439Application Date: 2006-06-29
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Publication No.: US07692768B2Publication Date: 2010-04-06
- Inventor: Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
- Applicant: Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/42 ; G03B27/62
Abstract:
Methods and apparatus for shielding a reticle within an illumination system are disclosed. According to one aspect of the present invention, a blind arrangement for shielding an object such as a reticle includes a coil assembly which has at least one coil, an air supply that supplies air, and a first blind portion. The first blind portion includes at least one magnet and is not in physical contact with the coil. The first blind portion is supported at a distance from the coil by the air, and the coil assembly cooperates with the magnet to cause the first blind portion to move. The first blind portion shields the object when the first blind portion is in a first position.
Public/Granted literature
- US20080002173A1 Iron Core Motor Driven Automatic Reticle Blind Public/Granted day:2008-01-03
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