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US07692881B2 Structure for use in a projection exposure system for manufacturing semiconductors 有权
用于制造半导体的投影曝光系统的结构

Structure for use in a projection exposure system for manufacturing semiconductors
Abstract:
A structure for mounting an assembly of optical elements disposed within a housing, in particular of a projection lens assembly of a projection exposure system for manufacturing semiconductor elements includes a plurality of supporting elements, each respective one of which forms part of a respective one of a plurality of connections though which the housing of the assembly is connected to said supporting structure through which the weight of the assembly is transferred to the supporting structure in such a way that supporting forces generated by said supporting structure are taken up by pressure forces and shear forces which act on at least one of the supporting elements.
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