Invention Grant
US07692884B2 Optical apparatus, barrel, exposure apparatus, and production method for device 有权
光学装置,镜筒,曝光装置及装置的制造方法

  • Patent Title: Optical apparatus, barrel, exposure apparatus, and production method for device
  • Patent Title (中): 光学装置,镜筒,曝光装置及装置的制造方法
  • Application No.: US11666166
    Application Date: 2005-10-24
  • Publication No.: US07692884B2
    Publication Date: 2010-04-06
  • Inventor: Mitsuo Ishikawa
  • Applicant: Mitsuo Ishikawa
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Oliff & Berridge, PLC
  • Priority: JP2004-311482 20041026
  • International Application: PCT/JP2005/019495 WO 20051024
  • International Announcement: WO2006/046507 WO 20060504
  • Main IPC: G02C7/02
  • IPC: G02C7/02
Optical apparatus, barrel, exposure apparatus, and production method for device
Abstract:
An optical system improved in weight balance and stability, comprising drive mechanisms that support, movable with respect to an outer ring, a virtual rigid body consisting of an inner ring, optical element in a shape asymmetrical with respect to the optical axis, and optical element holding members for holding the optical element and fixing it to the inner ring. The inner ring, the outer ring and drive mechanisms function as a parallel link mechanism. Balance weights are provided on the virtual rigid body such that the weight of the virtual rigid body acts uniformly on the drive mechanisms. Therefore, the optical element is not likely to vibrate when subjected to an external vibration or at adjusting. The optical system is suitable for use in an exposure system requiring high exposure accuracy.
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