Invention Grant
US07692957B2 Phase change memory device with ensured sensing margin and method of manufacturing the same 失效
具有确保传感距离的相变存储器件及其制造方法

  • Patent Title: Phase change memory device with ensured sensing margin and method of manufacturing the same
  • Patent Title (中): 具有确保传感距离的相变存储器件及其制造方法
  • Application No.: US11647729
    Application Date: 2006-12-29
  • Publication No.: US07692957B2
    Publication Date: 2010-04-06
  • Inventor: Heon Yong Chang
  • Applicant: Heon Yong Chang
  • Applicant Address: KR Kyoungki-do
  • Assignee: Hynix Semiconductor Inc.
  • Current Assignee: Hynix Semiconductor Inc.
  • Current Assignee Address: KR Kyoungki-do
  • Agency: Ladas & Parry LLP
  • Priority: KR10-2006-0106899 20061031
  • Main IPC: G11C11/00
  • IPC: G11C11/00
Phase change memory device with ensured sensing margin and method of manufacturing the same
Abstract:
A phase change memory device includes a semiconductor substrate having a plurality of bar-type active areas. A plurality of word lines are arranged in a direction perpendicular to the active areas on the semiconductor substrate, and a first pair of the word lines connected to each other at each first end thereof is arranged alternately with a second pair of the word lines connected to each other at each second end thereof opposite to the first end. Source areas and drain areas are formed in the active areas. Common source areas are each connected to the source areas. A plurality of lower electrodes are connected to the respective drain areas. Phase change layers make contact with every two diagonally adjoining lower electrodes. Upper electrodes are formed on the phase change layers, and bit lines are arranged in a direction of the active areas and are connected to the upper electrodes.
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