Invention Grant
- Patent Title: Pre-ionizer for pulsed gas-discharge laser
- Patent Title (中): 用于脉冲气体放电激光器的预电离器
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Application No.: US11900530Application Date: 2007-09-12
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Publication No.: US07693207B2Publication Date: 2010-04-06
- Inventor: Raul Martin Wong Gutierrez
- Applicant: Raul Martin Wong Gutierrez
- Applicant Address: US CA Santa Clara
- Assignee: Coherent, Inc.
- Current Assignee: Coherent, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Morrison & Foerster LLP
- Main IPC: H01S3/22
- IPC: H01S3/22

Abstract:
In a CO2 laser a pre-ionizer is assembled in a flange configured to be attached to a laser-gas enclosure of the laser over an aperture in a wall of the enclosure. An aperture in the base of the flange is aligned over the aperture in the enclosure wall. The aperture in the pre-ionizer flange is covered by a ceramic membrane. A disc electrode is in contact with the ceramic membrane on a side of the membrane outside of the laser-gas enclosure. An RF potential applied to the disc electrode creates a corona discharge on the side of the ceramic membrane inside the enclosure. The corona discharge ionizes laser gas in the enclosure before RF power is applied to electrodes of the slab laser. A cylindrical ceramic sleeve extends from the membrane for containing the discharge.
Public/Granted literature
- US20090067467A1 Pre-ionizer for pulsed gas-discharge laser Public/Granted day:2009-03-12
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