Invention Grant
US07693264B2 Antechamber control reducing leak through ferrofluid seals 失效
Antechamber控制通过铁流体密封减少泄漏

Antechamber control reducing leak through ferrofluid seals
Abstract:
A system for controlling a gas load imposed upon a high vacuum chamber includes a first chamber enclosing a high vacuum and positioned within an ambient environment, a second chamber enclosing a gas and positioned within the ambient environment adjacent to the first chamber, and a rotatable shaft having a first portion extending into the first chamber and a second portion extending into the second chamber. A ferrofluid seal is positioned about the rotatable shaft and positioned between the first portion and the second portion and the ferrofluid seal fluidically separates the first chamber from the second chamber. A control unit is attached to the second chamber and configured to control the gas enclosed in the second chamber such that a gas load in the first chamber is reduced.
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