Invention Grant
US07693687B2 Controller and method to mediate data collection from smart sensors for fab applications
有权
控制器和方法，用于调查晶圆应用的智能传感器的数据采集
- Patent Title: Controller and method to mediate data collection from smart sensors for fab applications
- Patent Title (中): 控制器和方法，用于调查晶圆应用的智能传感器的数据采集
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Application No.: US11566632Application Date: 2006-12-04
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Publication No.: US07693687B2Publication Date: 2010-04-06
- Inventor: Uzi Lev-Ami , Guenter Sifnatsch , Mark Attwood
- Applicant: Uzi Lev-Ami , Guenter Sifnatsch , Mark Attwood
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Haynes, Beffel & Wolfeld, LLP
- Agent Ernest J. Beffel, Jr.
- Main IPC: G06F17/18
- IPC: G06F17/18
Abstract:
The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.
Public/Granted literature
- US20070150235A1 Controller and Method to Mediate Data Collection from Smart Sensors for Fab Applications Public/Granted day:2007-06-28
Information query
