Invention Grant
- Patent Title: Apparatus for transporting substrates under a controlled atmosphere
- Patent Title (中): 用于在受控气氛下运输基材的装置
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Application No.: US11109853Application Date: 2005-04-20
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Publication No.: US07694700B2Publication Date: 2010-04-13
- Inventor: Roland Bernard , Hisanori Kambara , Jean-Luc Rival , Catherine Le Guet
- Applicant: Roland Bernard , Hisanori Kambara , Jean-Luc Rival , Catherine Le Guet
- Applicant Address: FR Paris
- Assignee: Alcatel
- Current Assignee: Alcatel
- Current Assignee Address: FR Paris
- Agency: Carmen Patti Law Group, LLC
- Priority: FR0450751 20040421
- Main IPC: B65D85/86
- IPC: B65D85/86 ; B65B31/00

Abstract:
Apparatus of the invention for transporting substrates (3) comprises a mini-environment enclosure (1) that is movable and that can be coupled to a conditioning station (22). The mini-environment enclosure (1) includes a micropump (12) whose inlet is connected to an inside cavity (2) that is to contain the substrate (3) to be transported. An energy supply (16) is also provided in the mini-environment enclosure (1) to power the micropump (12). The mini-environment enclosure (1) comprises a peripheral shell (4) open to two opposite main faces (5, 6), and including a closable side opening (7). A first main wall (8) is fitted to close the first main face (5) in leaktight manner. A second main wall (9) is fitted and secured to close the second main face (6) in leaktight manner. The first and second main walls are disposed in planes parallel to the plane containing the substrate. This makes it easier to manufacture the mini-environment enclosure, while also providing modularity so that the main walls (8, 9) can have functions that are different and can be interchanged.
Public/Granted literature
- US20050238476A1 Apparatus for transporting substrates under a controlled atmosphere Public/Granted day:2005-10-27
Information query
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