Invention Grant
US07694817B2 Container for storing substrate having ventilated lid and fan 有权
用于储存具有通风盖和风扇的基板的容器

Container for storing substrate having ventilated lid and fan
Abstract:
A container configured to hold a plurality of substrates lined up vertically with space therebetween, which includes a container main unit formed in a tube shape having a quadrangular cross section as a whole that includes a first opening provided on one end side and a second opening provided on the other end side of the container spaced apart in the horizontal direction from the first opening, the first opening serving as an entrance for loading and unloading the substrates, a fan filter unit that is provided in an area of the second opening and that causes movement of air from the second opening toward the first opening, and a lid configured to be attached in an area of the entrance of the container main unit, the lid having an open state and a closed state, and forming a ventilation opening that allows air to pass in the closed state.
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