Invention Grant
US07695104B2 Slotted substrates and methods and systems for forming same 有权
开槽衬底及其形成方法和系统

Slotted substrates and methods and systems for forming same
Abstract:
Methods and systems for forming compound slots in a substrate are described. In one exemplary implementation, a structure contains a plurality of slots in a substrate. The structure also has a trench in the substrate contiguous with the plurality of slots to form a compound slot.
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