Invention Grant
US07695231B2 Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
有权
真空泵送系统，其驱动方法，具有该真空泵系统的装置，以及使用其的基板的转移方法
- Patent Title: Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
- Patent Title (中): 真空泵送系统，其驱动方法，具有该真空泵系统的装置，以及使用其的基板的转移方法
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Application No.: US11076512Application Date: 2005-03-08
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Publication No.: US07695231B2Publication Date: 2010-04-13
- Inventor: Hong-Seub Kim , Hyun-Soo Park , Soon-Bin Jung , Sung-Ho Cha , Dong-Jin Kim , Wook-Jung Hwang , Jin-Hyuk Yoo
- Applicant: Hong-Seub Kim , Hyun-Soo Park , Soon-Bin Jung , Sung-Ho Cha , Dong-Jin Kim , Wook-Jung Hwang , Jin-Hyuk Yoo
- Applicant Address: KR Gwangju-si, Gyeonggi-do
- Assignee: JUSUNG Engineering Co., Ltd.
- Current Assignee: JUSUNG Engineering Co., Ltd.
- Current Assignee Address: KR Gwangju-si, Gyeonggi-do
- Priority: KR10-2004-0015544 20040308; KR10-2004-0017627 20040316; KR10-2004-0017832 20040317; KR10-2005-0014819 20050223
- Main IPC: B65G49/00
- IPC: B65G49/00
Abstract:
An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.
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