Invention Grant
US07695239B2 End effector gripper arms having corner grippers which reorient reticle during transfer
失效
末端执行器夹持臂具有在传送期间重新调整掩模版的角夹头
- Patent Title: End effector gripper arms having corner grippers which reorient reticle during transfer
- Patent Title (中): 末端执行器夹持臂具有在传送期间重新调整掩模版的角夹头
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Application No.: US10891406Application Date: 2004-07-14
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Publication No.: US07695239B2Publication Date: 2010-04-13
- Inventor: Kung Chris Wu
- Applicant: Kung Chris Wu
- Applicant Address: US CA Sunnyvale
- Assignee: Fortrend Engineering Corporation
- Current Assignee: Fortrend Engineering Corporation
- Current Assignee Address: US CA Sunnyvale
- Agent Donald E. Schreiber
- Main IPC: H01L21/68
- IPC: H01L21/68
Abstract:
The present invention is a pod opener having an end effector which: a. grips and releases a reticle supported above the base of a pod; and b. while transferring the reticle between the base of the pod and an adjacent IC photolithography tool, reorients the reticle. In one embodiment, the pod opener reorients the reticle by rotating it about a single axis disposed substantially perpendicular to its patterned surface. In another embodiment, the present invention is a pod opener which while transferring the reticle between the base of the pod and an adjacent IC photolithography tool, in addition to effecting rotation substantially perpendicular to a reticle's patterned surface, also turns the reticle over so a patterned surface of the reticle is oriented for proper focus within the IC photolithography tool.
Public/Granted literature
- US20050013684A1 Single reticle transfer system Public/Granted day:2005-01-20
Information query
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