Invention Grant
- Patent Title: Regeneration process of alkaline permanganate etching solution and unit therefor
- Patent Title (中): 碱性高锰酸盐蚀刻溶液的再生过程及其单元
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Application No.: US11739332Application Date: 2007-04-24
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Publication No.: US07695638B2Publication Date: 2010-04-13
- Inventor: Norikazu Nakamura , Masao Nakazawa , Hidekazu Miyamoto , Kenji Miyazawa , Manabu Saito
- Applicant: Norikazu Nakamura , Masao Nakazawa , Hidekazu Miyamoto , Kenji Miyazawa , Manabu Saito
- Applicant Address: JP Nagano-shi
- Assignee: Shinko Electric Industries Co., Ltd.
- Current Assignee: Shinko Electric Industries Co., Ltd.
- Current Assignee Address: JP Nagano-shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2006-316829 20061124
- Main IPC: C23F1/02
- IPC: C23F1/02

Abstract:
In a reaction chamber (20), a used alkaline permanganate etching solution (12) is accommodated and an alkaline earth hydroxide (14) such as calcium hydroxide is added in the reaction chamber, a liquid inside of the reaction chamber is agitated, the liquid is exhausted from a side portion or a top portion of the reaction chamber through a filter (28), a precipitate (26) adhered to the filter is scraped off, and a precipitate containing a hardly soluble or insoluble matter incapable of passing through the filter and accumulated on a bottom portion of the reaction chamber is exhausted from the reaction chamber.
Public/Granted literature
- US20080124258A1 REGENERATION PROCESS OF ALKALINE PERMANGANATE ETCHING SOLUTION AND UNIT THEREFOR Public/Granted day:2008-05-29
Information query
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