Invention Grant
US07696011B2 Methods for applying front side and edge protection material to electronic devices at the wafer level, devices made by the methods, and systems including the devices 有权
将前端和边缘保护材料应用于晶圆级电子器件的方法,由该方法制造的器件以及包括器件的系统

  • Patent Title: Methods for applying front side and edge protection material to electronic devices at the wafer level, devices made by the methods, and systems including the devices
  • Patent Title (中): 将前端和边缘保护材料应用于晶圆级电子器件的方法,由该方法制造的器件以及包括器件的系统
  • Application No.: US11476467
    Application Date: 2006-06-28
  • Publication No.: US07696011B2
    Publication Date: 2010-04-13
  • Inventor: Tongbi JiangShijian Luo
  • Applicant: Tongbi JiangShijian Luo
  • Applicant Address: US ID Boise
  • Assignee: Micron Technology, Inc.
  • Current Assignee: Micron Technology, Inc.
  • Current Assignee Address: US ID Boise
  • Agency: TraskBritt
  • Main IPC: H01L21/44
  • IPC: H01L21/44 H01L21/48
Methods for applying front side and edge protection material to electronic devices at the wafer level, devices made by the methods, and systems including the devices
Abstract:
Methods for applying a dielectric protective layer to a wafer in wafer-level chip-scale package manufacture are disclosed. A flowable dielectric protective material with fluxing capability is applied over the active surface of an unbumped semiconductor wafer to cover active device areas, bond pads, test socket contact locations, and optional pre-scribed wafer street trenches. Preformed solder balls are then disposed over the bond pads, and the wafer is subjected to a heating process to reflow the solder balls and at least partially cure the dielectric protective material. During the heating process, the dielectric protective material provides a fluxing capability to enable the solder balls to wet the bond pads. In other exemplary embodiments, the dielectric protective material is applied over only intended physical contact locations and/or pre-scribed wafer street trenches, in which case the dielectric protective material need not include flux material and may additionally include a filler material.
Information query
Patent Agency Ranking
0/0