Forming a packaged device having a semiconductor device having a first major surface and a second major surface includes forming an encapsulating layer over the second major surface of the semiconductor device and around sides of the semiconductor device and leaving the first major surface of the first semiconductor device exposed. An insulating layer is formed over the first major surface. A via is formed in the insulating layer. A tangible element is coupled to the semiconductor device through the via. At least a portion of the tangible element is surrounded with a cavity wall having a first face toward the element and a second face away from the element. A supporting layer, after surrounding the tangible element, is formed over the insulating layer so that the supporting layer is adjacent to the second face and blocked from the first face thereby providing protection for the tangible element.