Invention Grant
- Patent Title: Method for fabricating a semiconductor component and semiconductor component
- Patent Title (中): 半导体部件及半导体部件的制造方法
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Application No.: US11413320Application Date: 2006-04-28
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Publication No.: US07696041B2Publication Date: 2010-04-13
- Inventor: Ulrike Gruening-Von Schwerin
- Applicant: Ulrike Gruening-Von Schwerin
- Applicant Address: DE Munich
- Assignee: Qimonda AG
- Current Assignee: Qimonda AG
- Current Assignee Address: DE Munich
- Agency: Eschweiler & Associates, LLC
- Priority: DE102005020897 20050504
- Main IPC: H01L21/8242
- IPC: H01L21/8242

Abstract:
In a method for fabricating a semiconductor component, a semiconductor substrate comprising a first surface is provided and a shaping matrix is applied to the first surface. The shaping matrix comprises at least one continuous depression arranged in such a way that contact regions in a region of the first surface are at least partly uncovered. A sacrificial layer is applied to sidewalls of the continuous depression in an upper section of the depression, a first electrode is produced by applying a first conductive layer in a lower section of the depression and to the sacrificial layer, and the sacrificial layer is removed in order to uncover the sidewalls of the shaping matrix in the upper section. A dielectric layer is applied to the first conductive layer and a second electrode is formed by applying a second conductive layer to the dielectric layer.
Public/Granted literature
- US20060252222A1 Method for fabricating a semiconductor component and semiconductor component Public/Granted day:2006-11-09
Information query
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