Invention Grant
- Patent Title: Method for manufacturing passive device and semiconductor package using thin metal piece
- Patent Title (中): 使用薄金属片制造无源器件和半导体封装的方法
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Application No.: US11912178Application Date: 2005-09-06
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Publication No.: US07696055B2Publication Date: 2010-04-13
- Inventor: Young-Se Kwon , Kyoung-Min Kim
- Applicant: Young-Se Kwon , Kyoung-Min Kim
- Applicant Address: KR Daejeon KR Daejeon
- Assignee: Wavenicsesp,Korea Advanced Institute of Science and Technology
- Current Assignee: Wavenicsesp,Korea Advanced Institute of Science and Technology
- Current Assignee Address: KR Daejeon KR Daejeon
- Agency: Gifford, Krass, Sprinkle, Anderson & Citkowski, P.C.
- Priority: KR10-2005-0033011 20050421
- International Application: PCT/KR2005/002940 WO 20050906
- International Announcement: WO2006/112576 WO 20061026
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A method for manufacturing passive devices and semiconductor packages using a thin metal piece is provided. According to the method, an adhesive layer is formed on a dummy substrate; a thin metal piece is bonded on the adhesive layer; a masking material is attached to the thin metal piece, a region where vias are to be formed is patterned, the thin metal piece is etched at a predetermined depth; the masking material is removed, the etched portion is filled with polymer to form a flat polymer layer, a masking material is attached on the polymer layer, a region that is to be attached to an IPD or an IC chip is patterned, a metal pad is formed, and the formed devices are attached to a lower substrate using the metal pad; the adhesive layer and the dummy substrate are removed, a masking material is attached on a surface exposed, a region where passive devices are to be formed is patterned, and the thin metal piece is etched at a predetermined depth; and solder bumps for surface mounting are formed.
Public/Granted literature
- US20080194058A1 Method for Manufacturing Passive Device and Semiconductor Package Using Thin Metal Piece Public/Granted day:2008-08-14
Information query
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