Invention Grant
- Patent Title: System and method for digital light valve processing
- Patent Title (中): 数字光阀处理系统及方法
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Application No.: US11524607Application Date: 2006-09-21
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Publication No.: US07696070B2Publication Date: 2010-04-13
- Inventor: John W. Hartzell
- Applicant: John W. Hartzell
- Applicant Address: US WA Camas
- Assignee: Sharp Laboratories of America, Inc
- Current Assignee: Sharp Laboratories of America, Inc
- Current Assignee Address: US WA Camas
- Agency: Law Office of Gerald Maliszewski
- Agent Gerald Maliszewski
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A system and method are provided for processing a semiconductor film using a digital light valve. The method enables pixel elements from an array of selectable pixel elements; gates a light in response to enabling the pixel elements; exposes selected areas of a semiconductor film, such as Si, to the gated light; and, creates light-related reactions in the semiconductor film, in response to the light exposure. More specifically, enabling pixel elements from an array of selectable pixel elements may include: exposing a digital light valve array of selectable pixel elements to the light; enabling a pattern of pixel elements; and, transmitting light from the pattern of enabled pixel elements. Examples of light-related reactions include changing the topology of a film surface, creating a chemical reaction, diffusing a dopant, activating a dopant, alloying the semiconductor film, and changing the semiconductor crystalline structure.
Public/Granted literature
- US20080009084A1 System and method for digital light valve processing Public/Granted day:2008-01-10
Information query
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