Invention Grant
US07696079B2 Methods for patterning films, fabricating organic electroluminescence display and fabricating thin film transistor array substrate 有权
图案化膜的方法,制造有机电致发光显示器和制造薄膜晶体管阵列基板

Methods for patterning films, fabricating organic electroluminescence display and fabricating thin film transistor array substrate
Abstract:
A method for fabricating a thin film transistor array substrate is provided. Wherein, a plurality of contact holes and recesses are formed in a protection layer disposed upon thin film transistors. Each recess comprises an under-cut profile while each contact hole exposes a drain-metal layer of a corresponding thin film transistor. Then, a transparent conductor layer is formed on the protection layer, which in turn fills in the contact holes so as to be electrically connected to the drain-metal layer. Besides, the transparent conductor layer automatically segregates at the recesses to form a plurality of pixel electrodes, whereby the plurality of pixel electrodes can be formed without the utilization of photolithography and etching processes and thus fabricating cost is lowered.
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