Invention Grant
- Patent Title: Methods for patterning films, fabricating organic electroluminescence display and fabricating thin film transistor array substrate
- Patent Title (中): 图案化膜的方法,制造有机电致发光显示器和制造薄膜晶体管阵列基板
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Application No.: US11162867Application Date: 2005-09-27
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Publication No.: US07696079B2Publication Date: 2010-04-13
- Inventor: Hsi-Ming Chang
- Applicant: Hsi-Ming Chang
- Applicant Address: TW Taoyuan
- Assignee: Chunghwa Picture Tubes, Ltd.
- Current Assignee: Chunghwa Picture Tubes, Ltd.
- Current Assignee Address: TW Taoyuan
- Agency: Jianq Chyun IP Office
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A method for fabricating a thin film transistor array substrate is provided. Wherein, a plurality of contact holes and recesses are formed in a protection layer disposed upon thin film transistors. Each recess comprises an under-cut profile while each contact hole exposes a drain-metal layer of a corresponding thin film transistor. Then, a transparent conductor layer is formed on the protection layer, which in turn fills in the contact holes so as to be electrically connected to the drain-metal layer. Besides, the transparent conductor layer automatically segregates at the recesses to form a plurality of pixel electrodes, whereby the plurality of pixel electrodes can be formed without the utilization of photolithography and etching processes and thus fabricating cost is lowered.
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