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US07696102B2 Methods for fabrication of three-dimensional structures 有权
制造三维结构的方法

  • Patent Title: Methods for fabrication of three-dimensional structures
  • Patent Title (中): 制造三维结构的方法
  • Application No.: US11278137
    Application Date: 2006-03-30
  • Publication No.: US07696102B2
    Publication Date: 2010-04-13
  • Inventor: Gang Zhang
  • Applicant: Gang Zhang
  • Main IPC: H01L21/461
  • IPC: H01L21/461
Methods for fabrication of three-dimensional structures
Abstract:
A multi-layer fabrication method for making three-dimensional structures is provided. In one embodiment, the formation of a multi-layer three-dimensional structure comprises: 1) fabricating a plurality of layers with each layer comprising at least two materials; 2) aligning the layers; 3) attaching the layers together to form a multi-layer structure; and 4) removing at least a portion of at least one of the materials from the multi-layer structure. Fabrication methods for making the required layers are also disclosed. In another embodiment, the formation of a multi-layer three-dimensional structure comprises: 1) attaching a layer of a material to a substrate or a previously formed layer; 2) machining the attached layer to form a layer that comprises at least two materials; and 3) repeating the operations of 1) and 2) a plurality of times to form a multi-layer structure; and 4) removing at least a portion of at least one of the materials from the multi-layer structure to form a desired three-dimensional structure.
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