Invention Grant
- Patent Title: Beam angle adjustment in ion implanters
- Patent Title (中): 离子注入机中的角度调整
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Application No.: US11757063Application Date: 2007-06-01
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Publication No.: US07696494B2Publication Date: 2010-04-13
- Inventor: Bo H. Vanderberg , Xiangyang Wu
- Applicant: Bo H. Vanderberg , Xiangyang Wu
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/20

Abstract:
A steering component is included in an ion implantation system to direct or “steer” an ion beam to a scan vertex of a scanning component downstream of the steering component. In this manner, the scan vertex of the scanning component coincides with the focal point of a parallelizing component downstream of the scanning component. This allows the beam to emerge from the parallelizing component at an expected angle so that ions can be implanted in a desired manner into a workpiece located downstream of the parallelizing component.
Public/Granted literature
- US20080067442A1 BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS Public/Granted day:2008-03-20
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