Invention Grant
- Patent Title: Semiconductor device and manufacturing method thereof
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US11338715Application Date: 2006-01-25
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Publication No.: US07696531B2Publication Date: 2010-04-13
- Inventor: Akio Miyao
- Applicant: Akio Miyao
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2005-067535 20050310
- Main IPC: H01L29/74
- IPC: H01L29/74 ; H01L21/4763

Abstract:
A semiconductor device includes: an channel layer formed on a semiconductor substrate; a drain electrode and a source electrode both formed on the channel layer apart from each other; a surface passivation film formed on the channel layer so as to cover the channel layer except for the drain electrode and the source electrode; a gate electrode disposed between the drain electrode and the source electrode so as to penetrate the surface passivation film; a field plate electrode provided on the surface passivation film between the drain electrode and the gate electrode at a predetermined distance from the gate electrode; and a connecting plate having a bridge structure connecting the gate electrode to the field plate electrode. The bridge structure may be formed with at least one opening penetrating the connecting plate so as to face the surface passivation film with a predetermined space.
Public/Granted literature
- US20060202246A1 Semiconductor device and manufacturing method thereof Public/Granted day:2006-09-14
Information query
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