Invention Grant
- Patent Title: Multiple crystallographic orientation semiconductor structures
- Patent Title (中): 多晶体取向半导体结构
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Application No.: US11931209Application Date: 2007-10-31
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Publication No.: US07696573B2Publication Date: 2010-04-13
- Inventor: Shreesh Narasimha , Paul David Agnello , Xiaomeng Chen , Judson R. Holt , Mukesh Vijay Khare , Byeong Y. Kim , Devandra K. Sadana
- Applicant: Shreesh Narasimha , Paul David Agnello , Xiaomeng Chen , Judson R. Holt , Mukesh Vijay Khare , Byeong Y. Kim , Devandra K. Sadana
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Joseph P. Abate, Esq.
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L27/12 ; H01L31/0392 ; H01L29/00

Abstract:
A semiconductor structure includes an epitaxial surface semiconductor layer having a first dopant polarity and a first crystallographic orientation, and a laterally adjacent semiconductor-on-insulator surface semiconductor layer having a different second dopant polarity and different second crystallographic orientation. The epitaxial surface semiconductor layer has a first edge that has a defect and an adjoining second edge absent a defect. Located within the epitaxial surface semiconductor layer is a first device having a first gate perpendicular to the first edge and a second device having a second gate perpendicular to the second edge. The first device may include a performance sensitive logic device and the second device may include a yield sensitive memory device. An additional semiconductor structure includes a further laterally adjacent second semiconductor-on-insulator surface semiconductor layer having the first polarity and the second crystallographic orientation, and absent edge defects, to accommodate yield sensitive devices.
Public/Granted literature
- US20090108302A1 MULTIPLE CRYSTALLOGRAPHIC ORIENTATION SEMICONDUCTOR STRUCTURES Public/Granted day:2009-04-30
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