Invention Grant
- Patent Title: Formation of standard voltage threshold and low voltage threshold MOSFET devices
-
Application No.: US11877744Application Date: 2007-10-24
-
Publication No.: US07696579B2Publication Date: 2010-04-13
- Inventor: Mark Helm , Xianfeng Zhou
- Applicant: Mark Helm , Xianfeng Zhou
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Dinsmore & Shohl LLP
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L31/00

Abstract:
Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.
Public/Granted literature
- US20080042216A1 FORMATION OF STANDARD VOLTAGE THRESHOLD AND LOW VOLTAGE THRESHOLD MOSFET DEVICES Public/Granted day:2008-02-21
Information query
IPC分类: