Invention Grant
- Patent Title: Movable-body apparatus, exposure apparatus and methods comprising same, and device-manufacturing methods
- Patent Title (中): 移动体装置，曝光装置及其制造方法以及装置制造方法
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Application No.: US11712243Application Date: 2007-02-27
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Publication No.: US07696653B2Publication Date: 2010-04-13
- Inventor: Keiichi Tanaka
- Applicant: Keiichi Tanaka
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Klarquist Sparkman, LLP
- Priority: JP2006-095982 20060330
- Main IPC: H02K41/02
- IPC: H02K41/02
Abstract:
Movable-body apparatus, notably configured as stages, are disclosed that include at least one movable body and at least one respective actuator. The actuator drives the movable body in the direction of at least one axis in a predetermined plane. A waste-heat member is situated in a non-contacting manner with the movable body. The waste-heat member absorbs heat radiated from the movable body. Thus, adverse thermal influences of the movable body are suppressed without a need to connect a coolant conduit to the movable body, which eliminates decreases in movement accuracy conventionally caused by tension of such a conduit on the movable body.
Public/Granted literature
- US20070273860A1 Movable-body apparatus, exposure apparatus and methods comprising same, and device-manufacturing methods Public/Granted day:2007-11-29
Information query
