Invention Grant
- Patent Title: Catadioptric projection objective
- Patent Title (中): 反射折射投影物镜
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Application No.: US10576265Application Date: 2004-10-15
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Publication No.: US07697198B2Publication Date: 2010-04-13
- Inventor: David Shafer , Alexander Epple , Aurelian Dodoc , Wilhelm Ulrich , Karl-Heinz Schuster
- Applicant: David Shafer , Alexander Epple , Aurelian Dodoc , Wilhelm Ulrich , Karl-Heinz Schuster
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- International Application: PCT/EP2004/011587 WO 20041015
- International Announcement: WO2005/040890 WO 20050506
- Main IPC: G02B17/08
- IPC: G02B17/08

Abstract:
A catadioptric projection objective for projecting a pattern arranged in the object plane of the projection objective into the image plane of the projection objective, having: a first objective part for projecting an object field lying in the object plane into a first real intermediate image; a second objective part for generating a second real intermediate image with the radiation coming from the first objective part; a third objective part for generating a third real intermediate image with the radiation coming from the second objective part; and a fourth objective part for projecting the third real intermediate image into the image plane.
Public/Granted literature
- US20080037111A1 Catadioptric Projection Objective Public/Granted day:2008-02-14
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |