Invention Grant
US07697222B2 Apparatus for holding optical element, barrel, exposure apparatus, and device producing method 有权
用于保持光学元件,镜筒,曝光装置和装置制造方法的装置

  • Patent Title: Apparatus for holding optical element, barrel, exposure apparatus, and device producing method
  • Patent Title (中): 用于保持光学元件,镜筒,曝光装置和装置制造方法的装置
  • Application No.: US10584177
    Application Date: 2004-12-22
  • Publication No.: US07697222B2
    Publication Date: 2010-04-13
  • Inventor: Yuichi Shibazaki
  • Applicant: Yuichi Shibazaki
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Priority: JP2003-431484 20031225
  • International Application: PCT/JP2004/019265 WO 20041222
  • International Announcement: WO2005/064382 WO 20050714
  • Main IPC: G02B7/02
  • IPC: G02B7/02
Apparatus for holding optical element, barrel, exposure apparatus, and device producing method
Abstract:
A holding apparatus (38) for holding an optical element (37) at a controlled position and attitude. The optical element (37) is held at an inner ring (43) by a piezo housing (54). A piezo element (65) is isolated from the optical element (37). When the piezo element (65) elongates and contracts, a displacement section (70) is displaced in a plane perpendicular to the optical axis of the optical element while being guided by a parallel link section (71). A transmission link section (72) converts the direction of the displacement of the optical element (37) to transmit the result to a part of the inner ring (43).
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