Invention Grant
- Patent Title: Fiber optic pressure sensors and catheters
- Patent Title (中): 光纤压力传感器和导管
-
Application No.: US12356678Application Date: 2009-01-21
-
Publication No.: US07697798B2Publication Date: 2010-04-13
- Inventor: Nicholas Lagakos , Joseph A Bucaro
- Applicant: Nicholas Lagakos , Joseph A Bucaro
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee Address: US DC Washington
- Agent Amy L. Ressing; Sally A. Ferrett
- Main IPC: G02B6/00
- IPC: G02B6/00 ; B29D11/00 ; G01J1/56 ; G01L19/04 ; H01L21/00

Abstract:
A catheter with many fiber optic pressure sensors. The sensor diaphragm is formed from a wafer with a thin silicon layer and a silicon substrate layer separated by a silicon dioxide layer. A method includes masking and etching channels through the silicon substrate layer in a pattern of concentric circles to form a concentric circular etched channels and cylindrical unetched portions of the silicon substrate layer between the channels, exposing the silicon dioxide in the etched regions, and dissolving the exposed silicon dioxide to expose the crystalline silicon layer in the etched regions. The unetched cylindrical portion of the silicon substrate forms the diaphragm support element and the thin silicon layer forms the diaphragm. After applying a reflective coating to the exposed thin silicon layer, the support element face is adhered to the end face of a tubular housing, and a fiber optic probe is inserted in the tubular housing.
Public/Granted literature
- US20090202195A1 Fiber Optic Pressure Sensors and Catheters Public/Granted day:2009-08-13
Information query