Invention Grant
- Patent Title: Nonvolatile memory device and method of forming the same
- Patent Title (中): 非易失存储器件及其形成方法
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Application No.: US11699112Application Date: 2007-01-29
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Publication No.: US07700426B2Publication Date: 2010-04-20
- Inventor: Tae-Kyung Kim , Sung-Nam Chang , Dong-Seog Eun
- Applicant: Tae-Kyung Kim , Sung-Nam Chang , Dong-Seog Eun
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Mills & Onello, LLP
- Priority: KR10-2006-0102568 20061020
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
Provided is a nonvolatile memory device and a method of forming the nonvolatile memory device. The nonvolatile memory device includes a floating gate formed on a first active region doped with a first-conductivity-type dopant. The floating gate is doped with the first-conductivity-type dopant. Therefore, the thickness of a tunnel insulation layer can be kept thin, and the threshold voltage of a nonvolatile memory cell including the floating gate can be increased. As a result, the endurance of the tunnel insulation layer and the data retention characteristics of the nonvolatile memory cell is improved.
Public/Granted literature
- US20080093650A1 Nonvolatile memory device and method of forming the same Public/Granted day:2008-04-24
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