Invention Grant
- Patent Title: Cleaning composition and method of cleaning therewith
- Patent Title (中): 清洗组合物及其清洗方法
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Application No.: US10534351Application Date: 2003-11-07
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Publication No.: US07700532B2Publication Date: 2010-04-20
- Inventor: Ichiro Hayashida , Hironori Mizuta , Takehisa Kato
- Applicant: Ichiro Hayashida , Hironori Mizuta , Takehisa Kato
- Applicant Address: JP Osaka-shi
- Assignee: Wako Pure Chemical Industries, Ltd.
- Current Assignee: Wako Pure Chemical Industries, Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Westerman, Hattori, Daniels & Adrain, LLP
- Priority: JP2002-324853 20021108
- International Application: PCT/JP03/14183 WO 20031107
- International Announcement: WO2004/042811 WO 20040521
- Main IPC: C11D7/32
- IPC: C11D7/32

Abstract:
The present invention relates to a liquid cleaner for a semiconductor substrate on which metal wiring may be provided, comprising each component of a chelating agent or a salt thereof shown by the following general formula (1), an alkaline compound and pure water, wherein pH is 8 to 13: (wherein, Y1 and Y2 are lower alkylene groups, n is an integer of 0 to 4, at least 4 of R1 to R4 and n R5s are alkyl groups having phosphonic acid group(s) and the rest are alkyl groups) and a cleaning method using the same. The present invention provides a liquid cleaner which can efficiently remove fine particles or impurities derived from various metals at semiconductor substrate surface, even when used after a process adopting an alkaline polishing agent or alkaline etching liquid, without generating problems of causing difficult-to-remove gelled particles at the substrate surface or easy generation of rough semiconductor substrate surface, and a cleaning method using the same.
Public/Granted literature
- US20060154838A1 Cleaning composition and method of cleaning therewith Public/Granted day:2006-07-13
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