Invention Grant
- Patent Title: Orientation-independent multi-layer BEOL capacitor
- Patent Title (中): 取向无关多层BEOL电容
-
Application No.: US11831208Application Date: 2007-07-31
-
Publication No.: US07701037B2Publication Date: 2010-04-20
- Inventor: Anil K. Chinthakindi , Eric Thompson
- Applicant: Anil K. Chinthakindi , Eric Thompson
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Katherine Brown
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
A plurality of interdigitized conductive fingers are arranged to form a substantially square configuration in each of a plurality of layers separated by a high dielectric constant material, wherein each of the plurality of interdigitized conductive fingers includes at least one bend of substantially ninety degrees. The plurality of interdigitized conductive fingers includes a first set of fingers that are connected to an anode terminal, and a second set of fingers that are connected to a cathode terminal. The plurality of layers includes a bottommost layer that is in closest proximity to a substrate relative to other layers of the plurality of layers. The bottommost layer does not include any fingers connected to the anode terminal.
Public/Granted literature
- US20090032904A1 ORIENTATION-INDEPENDENT MULTI-LAYER BEOL CAPACITOR Public/Granted day:2009-02-05
Information query
IPC分类: