Invention Grant
- Patent Title: Wiring structure and method for manufacturing the same
- Patent Title (中): 接线结构及其制造方法
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Application No.: US10558367Application Date: 2004-05-28
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Publication No.: US07701060B2Publication Date: 2010-04-20
- Inventor: Munehiro Tada , Yoshihiro Hayashi , Yoshimichi Harada , Fuminori Ito , Hiroto Ohtake , Tatsuya Usami
- Applicant: Munehiro Tada , Yoshihiro Hayashi , Yoshimichi Harada , Fuminori Ito , Hiroto Ohtake , Tatsuya Usami
- Applicant Address: JP Tokyo JP Kanagawa
- Assignee: NEC Corporation,NEC Electronics Corporation
- Current Assignee: NEC Corporation,NEC Electronics Corporation
- Current Assignee Address: JP Tokyo JP Kanagawa
- Agency: Sughrue Mion, PLLC
- Priority: JP2003-152743 20030529
- International Application: PCT/JP2004/007791 WO 20040528
- International Announcement: WO2004/107434 WO 20041209
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
There are provided with a wiring structure and a method for manufacturing the same wherein in a wiring structure of multi-layered wiring in which a metal wiring is formed on a substrate forming a semiconductor element thereby obtaining connection of the element, no damage to insulation property between the abutting wirings by occurrence of leakage current and no deterioration of insulation resistance property between the abutting wirings are achieved in case that fine metal wiring is formed in a porous insulation film. The insulation barrier layer 413 is formed between an interlayer insulation film and the metal wiring, in the metal wiring structure on the substrate forming the semiconductor element. The insulation barrier layer enables to reduce leakage current between the abutting wirings and to elevate the insulation credibility.
Public/Granted literature
- US20070013069A1 Wiring structure and method for manufacturing the same Public/Granted day:2007-01-18
Information query
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