Invention Grant
- Patent Title: Lithographic apparatus, device manufacturing method, and optical component
- Patent Title (中): 光刻设备,器件制造方法和光学元件
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Application No.: US11024013Application Date: 2004-12-29
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Publication No.: US07701554B2Publication Date: 2010-04-20
- Inventor: Levinus Pieter Bakker
- Applicant: Levinus Pieter Bakker
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Main IPC: G03B27/34
- IPC: G03B27/34 ; G03B27/42

Abstract:
An optical component for use in a lithographic apparatus. The optical component includes an optical element having an optical surface for reflecting electromagnetic radiation, and a protective zone covering the optical surface. The protective zone is provided with a material that substantially protects the optical surface against sputtering when the optical component is in use. The material has a refractive index that approximately equals unity for at least a predetermined wavelength of electromagnetic radiation to which the optical surface is exposed.
Public/Granted literature
- US20060141367A1 Lithographic apparatus, device manufacturing method, and optical component Public/Granted day:2006-06-29
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