Invention Grant
- Patent Title: Pressure sensor
- Patent Title (中): 压力传感器
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Application No.: US11630015Application Date: 2005-06-13
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Publication No.: US07703329B2Publication Date: 2010-04-27
- Inventor: Masashi Sekine , Hidefumi Harada
- Applicant: Masashi Sekine , Hidefumi Harada
- Applicant Address: JP
- Assignee: Yamatake Corporation
- Current Assignee: Yamatake Corporation
- Current Assignee Address: JP
- Agency: Cantor Colburn LLP
- Priority: JP2004-180267 20040617
- International Application: PCT/JP2005/010799 WO 20050613
- International Announcement: WO2005/124307 WO 20051229
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
There is provided a pressure sensor having: a sensor chip (30) which detects a pressure; a base plate (20 (21, 22)) which supports the sensor chip (30); and a support diaphragm (50) which is bonded to the base plate (20 (21, 22)) and supports the base plate (20 (21, 22)), wherein the pressure sensor (1) has a structure in which the support diaphragm (50) is joined to a package (10), and the sensor chip (30) and the base plate (20 (21, 22)) are supported in the package through the support diaphragm (50) alone, thereby constantly and accurately detecting a pressure without being affected by a heat stress caused due to heat from the outside.
Public/Granted literature
- US20080245154A1 Pressure Sensor Public/Granted day:2008-10-09
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