Invention Grant
US07703340B2 Chip for force sensor and force sensor 有权
力传感器和力传感器芯片

Chip for force sensor and force sensor
Abstract:
A force sensor chip which comprises: a base member, which includes an action portion to which an external force is applied through an attenuator, a support portion supporting the action portion, and a connection portion which connects the action portion and the support portion and deflects according to the applied external force; and a plurality of strain resistance elements which are arranged in the connection portion and detect the applied external force based on a deflection of the connection portion, wherein longitudinal directions of the plurality of the strain resistance elements are oriented in an identical direction.
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