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US07703911B2 Apparatus for forming a thin film using an inkjet printing method 失效
使用喷墨打印方法形成薄膜的装置

Apparatus for forming a thin film using an inkjet printing method
Abstract:
In an apparatus of forming a thin film, the apparatus has a printing chamber that forms a thin film on a substrate. The apparatus has at least two drying chambers that receive the substrate on which the thin film is formed and dry the thin film on the substrate. The two drying chambers may be independently controlled. Accordingly, the apparatus may reduce process time for forming the thin film without contamination of the substrate.
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