Invention Grant
- Patent Title: Apparatus for forming a thin film using an inkjet printing method
- Patent Title (中): 使用喷墨打印方法形成薄膜的装置
-
Application No.: US12176865Application Date: 2008-07-21
-
Publication No.: US07703911B2Publication Date: 2010-04-27
- Inventor: Jin-Koo Chung , Joon-Hoo Choi , Dong-Won Lee
- Applicant: Jin-Koo Chung , Joon-Hoo Choi , Dong-Won Lee
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC.
- Priority: KR2003-81123 20031117
- Main IPC: B41J2/01
- IPC: B41J2/01

Abstract:
In an apparatus of forming a thin film, the apparatus has a printing chamber that forms a thin film on a substrate. The apparatus has at least two drying chambers that receive the substrate on which the thin film is formed and dry the thin film on the substrate. The two drying chambers may be independently controlled. Accordingly, the apparatus may reduce process time for forming the thin film without contamination of the substrate.
Public/Granted literature
- US20080273072A1 APPARATUS FOR FORMING A THIN FILM USING AN INKJET PRINTING METHOD Public/Granted day:2008-11-06
Information query
IPC分类: