Invention Grant
- Patent Title: Apparatus and method for fabricating bonded substrate
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Application No.: US11254712Application Date: 2005-10-21
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Publication No.: US07704348B2Publication Date: 2010-04-27
- Inventor: Takanori Muramoto , Takuya Ohno , Tsukasa Adachi , Koji Hashizume , Yosimasa Miyajima , Takao Kojima
- Applicant: Takanori Muramoto , Takuya Ohno , Tsukasa Adachi , Koji Hashizume , Yosimasa Miyajima , Takao Kojima
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Staas & Halsey LLP
- Priority: JP2002-076173 20020319
- Main IPC: B32B37/00
- IPC: B32B37/00

Abstract:
A bonded-substrate fabricating apparatus capable of reducing defective bonded substrates fabricated. A transfer robot sucks the outer edge area of the bottom surface of a substrate and spouts gas toward the bottom surface of the substrate to carry the substrate into a vacuum process chamber of a press machine while keeping the substrate horizontally. A press plate holds the substrate, which is held by the transfer robot, by suction.
Public/Granted literature
- US20060048896A1 Apparatus and method for fabricating bonded substrate Public/Granted day:2006-03-09
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