Invention Grant
- Patent Title: Method and apparatus for plating semiconductor wafers
- Patent Title (中): 用于电镀半导体晶片的方法和装置
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Application No.: US10879263Application Date: 2004-06-28
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Publication No.: US07704367B2Publication Date: 2010-04-27
- Inventor: Yezdi Dordi , Bob Maraschin , John Boyd , Fred C. Redeker , Carl Woods
- Applicant: Yezdi Dordi , Bob Maraschin , John Boyd , Fred C. Redeker , Carl Woods
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla & Gencarella, LLP
- Main IPC: C25D7/12
- IPC: C25D7/12 ; H01L21/288 ; B23H7/26 ; C25B11/00

Abstract:
First and second electrodes are disposed at first and second locations, respectively, proximate to a periphery of a wafer support, wherein the first and second location are substantially opposed to each other relative to the wafer support. Each of the first and second electrodes can be moved to electrically connect with and disconnect from a wafer held by the wafer support. An anode is disposed over and proximate to the wafer such that a meniscus of electroplating solution is maintained between the anode and the wafer. As the anode moves over the wafer from the first location to the second location, an electric current is applied through the meniscus between the anode and the wafer. Also, as the anode is moved over the wafer, the first and second electrodes are controlled to connect with the wafer while ensuring that the anode does not pass over an electrode that is connected.
Public/Granted literature
- US20050284767A1 Method and apparatus for plating semiconductor wafers Public/Granted day:2005-12-29
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