Invention Grant
US07704758B2 Optical device and its manufacturing method, and optical device wafer
有权
光学器件及其制造方法,以及光学器件晶圆
- Patent Title: Optical device and its manufacturing method, and optical device wafer
- Patent Title (中): 光学器件及其制造方法,以及光学器件晶圆
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Application No.: US11768239Application Date: 2007-06-26
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Publication No.: US07704758B2Publication Date: 2010-04-27
- Inventor: Yasutaka Imai
- Applicant: Yasutaka Imai
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2006-194189 20060714
- Main IPC: G01R31/26
- IPC: G01R31/26

Abstract:
A method for manufacturing an optical device, the method includes the steps of: forming a multilayer film, including forming a first mirror above a substrate, forming an active layer above the first mirror, forming a second mirror above the active layer, forming a semiconductor layer on the second mirror, and forming a sacrificial layer on the semiconductor layer; conducting a reflection coefficient examination on the multilayer film; patterning the multilayer film to form a surface-emitting laser section having the first mirror, the active layer and the second mirror, and a diode section having the semiconductor layer; and removing at least a portion of the sacrificial layer to expose at least a portion of an upper surface of the semiconductor layer, wherein an optical film thickness of the semiconductor layer is formed to be an odd multiple or an even multiple of λ/4, where λ is a design wavelength of light emitted by the surface-emitting laser section, andan optical film thickness of the sacrificial layer is formed not to be an odd multiple or an even multiple of λ/4.
Public/Granted literature
- US20080013583A1 OPTICAL DEVICE AND ITS MANUFACTURING METHOD, AND OPTICAL DEVICE WAFER Public/Granted day:2008-01-17
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