Invention Grant
US07704764B2 Fabrication method of GaN power LEDs with electrodes formed by composite optical coatings
有权
具有由复合光学涂层形成的电极的GaN功率LED的制造方法
- Patent Title: Fabrication method of GaN power LEDs with electrodes formed by composite optical coatings
- Patent Title (中): 具有由复合光学涂层形成的电极的GaN功率LED的制造方法
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Application No.: US12110428Application Date: 2008-04-28
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Publication No.: US07704764B2Publication Date: 2010-04-27
- Inventor: Jinmin Li , Xiaodong Wang , Guohong Wang , Liangchen Wang , Fuhua Yang
- Applicant: Jinmin Li , Xiaodong Wang , Guohong Wang , Liangchen Wang , Fuhua Yang
- Applicant Address: CN Beijing
- Assignee: Institute of Semiconductors, Chinese Academy of Sciences
- Current Assignee: Institute of Semiconductors, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Hunton & Williams LLP
- Priority: CN200710119473 20070725
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Fabrication method of GaN power LED with electrodes formed by composite optical coatings, comprising epitaxially growing N—GaN, active, and P—GaN layers successively on a substrate; depositing a mask layer thereon; coating the mask layer with photoresist; etching the mask layer into an N—GaN electrode pattern; etching through that electrode pattern to form an N—GaN electrode region; removing the mask layer and cleaning; forming a transparent, electrically conductive film simultaneously on the P—GaN and N—GaN layers; forming P—GaN and N—GaN transparent, electrically conductive electrodes by lift-off; forming bonding pad pattern for the P—GaN and N—GaN electrodes by photolithography process; simultaneously forming thereon bonding pad regions for the P—GaN and N—GaN electrodes by stepped electron beam evaporation; forming an antireflection film pattern by photolithography process; forming an antireflection film; thinning and polishing the backside of the substrate, then forming a reflector thereon; and completing the process after scribing, packaging and testing.
Public/Granted literature
- US20090029495A1 Fabrication Method of GaN Power LEDs with Electrodes Formed by Composite Optical Coatings Public/Granted day:2009-01-29
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