Invention Grant
- Patent Title: Optical device manufacturing method
- Patent Title (中): 光器件制造方法
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Application No.: US12396995Application Date: 2009-03-03
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Publication No.: US07704769B2Publication Date: 2010-04-27
- Inventor: Kazuhisa Arai
- Applicant: Kazuhisa Arai
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JP2008-065626 20080314
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
An optical device manufacturing method including the steps of: forming a groove with a depth corresponding to a finish thickness of the heat sink in a heat sink material at a position corresponding to an associated one of the streets sectioning the plurality of optical devices; joining the optical device layer of the optical device wafer to the heat sink material via a joining metal layer; cutting and dividing the optical device wafer along the streets into individual optical devices; sticking a protection member to the rear surface of the substrate of the optical device wafer; and grinding the rear surface of the heat sink material to expose the grooves to the rear surface to thereby divide the heat sink material into heat sinks corresponding to associated individual optical devices.
Public/Granted literature
- US20090233419A1 OPTICAL DEVICE MANUFACTURING METHOD Public/Granted day:2009-09-17
Information query
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