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US07704776B2 Method of forming a vertical image sensor that includes patterning an oxide layer to form a mask for implanting a floating diffusion area 失效
形成垂直图像传感器的方法,其包括图案化氧化物层以形成用于植入浮动扩散区域的掩模

  • Patent Title: Method of forming a vertical image sensor that includes patterning an oxide layer to form a mask for implanting a floating diffusion area
  • Patent Title (中): 形成垂直图像传感器的方法,其包括图案化氧化物层以形成用于植入浮动扩散区域的掩模
  • Application No.: US11936396
    Application Date: 2007-11-07
  • Publication No.: US07704776B2
    Publication Date: 2010-04-27
  • Inventor: Jeong-Su Park
  • Applicant: Jeong-Su Park
  • Applicant Address: KR Seoul
  • Assignee: Dongbu HiTek Co., Ltd.
  • Current Assignee: Dongbu HiTek Co., Ltd.
  • Current Assignee Address: KR Seoul
  • Agency: Sherr & Vaughn, PLLC
  • Priority: KR10-2006-0128326 20061215
  • Main IPC: H01L31/18
  • IPC: H01L31/18
Method of forming a vertical image sensor that includes patterning an oxide layer to form a mask for implanting a floating diffusion area
Abstract:
Embodiments relate to an image sensor and a method for manufacturing an image sensor that may prevent a photoresist pattern from remaining on gates by forming a floating diffusion area faster than the gates. According to embodiments, since the gates may not be influenced by an ion implantation process, current characteristics and operation reliability may be enhanced. According to embodiments, the method may include forming dummy ion implantation mask patterns for forming a floating diffusion area over an epitaxial layer and forming an ion implantation mask pattern over the epitaxial layer and at least a portion of the dummy ion implantation mask patterns, so as to form the floating diffusion area by performing an ion implantation process.
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